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STS Advanced Silicon Etcher

STS Advanced Silicon Etcher

Photo of STS Advanced Silicon Etcher

The STS Mesc Multiplex Advanced Silicon Etcher (ASE®) is an anisotropic deep silicon etching system. The tool is set-up to etch 4” silicon wafers, or piece-parts mounted to 4” silicon wafers or alumina sample carriers. The tool can also handle 6” wafers, but will only properly etch the center 4”.

STS ASE Instructions (pdf)


Surface Technology Systems plc
Imperial Park
Newport, NP10 8UJ
Tel: +44 1633 652400
Fax: +44 1633 652405

ST Systems USA Inc
177A Portsmouth Avenue
Stratham, NH 03885

Tel: (603) 775 0840
Fax: (603) 775 0441