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STS Advanced Silicon Etcher

STS Advanced Silicon Etcher

Photo of STS Advanced Silicon Etcher

The STS Mesc Multiplex Advanced Silicon Etcher (ASE®) is an anisotropic deep silicon etching system. The tool is set-up to etch 4” silicon wafers, or piece-parts mounted to 4” silicon wafers or alumina sample carriers. The tool can also handle 6” wafers, but will only properly etch the center 4”.

STS ASE Instructions (pdf)

Manufacturer:

Surface Technology Systems plc
Imperial Park
Newport, NP10 8UJ
UK
Tel: +44 1633 652400
Fax: +44 1633 652405

ST Systems USA Inc
177A Portsmouth Avenue
Stratham, NH 03885

Tel: (603) 775 0840
Fax: (603) 775 0441