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PlasmaLab Freon/O2 Reactive Ion Etcher (RIE) System

PlasmaLab Freon/O2 Reactive Ion Etcher (RIE) System

Photo of PlasmaLab Freon/O2 Reactive Ion Etcher (RIE) System

The PlasmaLab RIE has O2, R14 (CF4), and R23 (CHF3) gases available for use.

Freon RIE Instructions (pdf)