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Hitachi S-4800

Hitachi S-4800 Field Emission Scanning Electron Microscope

Photo of Hitachi S-4800

The Hitachi S-4800 field emission scanning electron microscope features a maximum resolution of 1.0 nm and a variable acceleration voltage of .5 - 30 kV. Both secondary electron and backscattering electron detectors are available for imaging.It features an image capture system for digital storage of images and image files can be transfered through network or USB drive. It can handle samples from piece-parts to 6" wafers. The stage can rotate 360° and tilt -5° to 70°. It provides STEM imaging capability at 30kV, which may be useful for STEM imaging in biological samples that cannot withstand 200kV accelerating voltage in standard TEM.

For more information, contact Edmond Chow (echow@illinois.edu)
Email to all S4800 users (MNTL-S4800-Users@illinois.edu)
Operating Procedure

Training Video

SEM image of 30nm Au disc

SEM image of 30nm Au disc

SEM image of sputtering Au particles

SEM image of sputtering Au particles