Cooke E-Beam/Thermal Evaporator
The Cooke The tool operates at a base pressure of 8 x 10 7 T and has 2 independent resistive power supplies and an electron beam (e beam) gun with 4 source crucibles. Currently approved deposition materials are Ag, Au, Cr, Ge, Ni, Mo, Pd, Pt, and Ti. Two 3 inch (75mm) round targets can be positioned above any of the three sources. Each source is controlled to provide control of deposition thickness and rate.