CHA SEC-600 E-Beam Evaporator

CHA SEC-600 E-Beam Evaporator

CHA Metals E-Beam Evaporator is available for users to evaporate their own metal sources. Currently approved deposition materials include: Al, Au, Ag, Cu, Cr, Ge, Ni, Mo, Pd, Pt, Ti and others on case-by-case basis. The CHA can accommodate small samples through 100 mm wafers.