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CEE Digital Hotplates

CEE Digital Hotplates

Photo of CEE Digital Hotplates

The CEE digital hotplates in the Electron-beam Chemistry Laboratory are for use in the pre-/post-exposure bake steps of electron beam lithography processes. One is maintained at 110 ºC and the other at 200ºC. They are capable of accommodating samples and mask plates up to 5” square.