Trion Minilock - Orion PECVD System
The Trion Minilock-Orion PECVD is a dual frequency system (13.56 MHz and 380 kHz) configured for deposition of silicon dioxide films. This tool can deposit on small samples through 150mm wafers.
The Trion Minilock-Orion PECVD is a dual frequency system (13.56 MHz and 380 kHz) configured for deposition of silicon dioxide films. This tool can deposit on small samples through 150mm wafers.