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University of Illinois at Urbana-Champaign
The Grainger College of Engineering
Holonyak Micro & Nanotechnology Lab
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Equipment
Home
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Cleanroom Labs
Equipment
Equipment
Equipment
Chemical Vapor Deposition
Aixtron III-V MOCVD GaN, AlGaN, InGaN
Oxford Dual Frequency PECVD
Trion Minilock - Orion PECVD System
Veeco Nanotech Atomic Layer Deposition System
Thermal
AG 610 Rapid Thermal Processor (RTP)
Diffusion/Oxidation Furnaces
Jipelec Rapid Thermal Processor (RTP)
Leica Critical Point Dryer
Etch
Oxford Chlorine ICP-RIE
Oxford Freon ICP-RIE
Oxford Freon RIE
Oxford Mixed ICP-RIE with Atomic Layer Etching
XACTIX XeF2 Etching System
Physical Vapor Deposition
CHA SEC-600 E-Beam Evaporator
Denton Dielectric E-beam Evaporator
Lesker Clean Metals E-Beam Evaporator
Lesker Contact Metals E-Beam Evaporator
Lesker Dielectric Sputterer
Lesker Metals DC Magnetron Sputterer
Lithography
Diener Descum
Elionix 150 keV E-Beam Lithography System
EVG 620 Double-Sided Mask Aligners
Headway Spinner
Heidelberg uPG 101 Maskless Lithography
Karl SUSS MJB3 Contact Mask Aligners
Metrology
DekTak DXT-A
Hitachi S-4800 Field Emission Scanning Electron Microscope
Jandel RM3000 Four Point Probe
M-Probe Thin Film Thickness Measurement System
Triple Wavelength Ellipsometer
Variable Temperature Film Stress Measurement System