Cleanroom Labs
Equipment
Chemical Vapor Deposition
Thermal
Etch
Physical Vapor Deposition
Lithography
Metrology
Cleanroom Hours
Main Hours: Mon-Fri 8AM-10PM, Sat 10AM-6PM, Sun Noon-8 PM
Engineering staff are available for questions and troubleshooting
HMNTL Cleanroom CLOSED:
Mon-Fri 10PM-8AM, Sat 6 pm-Sun Noon
No user will be allowed to work in the cleanroom
Special Occasions
There will be occasions (due to holidays, illness, or vacations) that the cleanroom will be closed. We will announce those circumstances with as much advance warning as possible to accommodate your research.
Cleanroom Staff
Edmond Chow
Senior Research Engineer
(217) 244-9556
echow@illinois.edu
Yaguang Lian
Research Engineer
(217) 333-8051
yglian@illinois.edu