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Cleanroom Labs

About MNTL Cleanroom Labs

cleanroom-map

The cleanroom facilities within the Micro and Nanotechnology Laboratory are comprised of fifteen separate 500-square-foot laboratories. Seven of the labs are class 100. Eight are class 1000. Being designed to have less than ten microinches of floor vibration insures optimum performance from sensitive processes e.g. electron-beam lithography and SEM imaging.

Being the first university laboratory to conform to the "H6" semiconductor fire and safety codes allows us to offer a safe world-class multi-user environment. In addition to smoke and heat sensors, an IST hydrogen detection system monitors the complete facility, while a DOD ChemLogic continuous gas monitor provides coverage in the materials growth labs. Safety systems are continuously monitored by the University Campus Safety group. Local fire departments are updated on specific new hazards or changes in laboratory operating procedures.

The MNTL professional engineering staff provides maintenance, repair, training and “best practices” to enhance resident and guest researchers laboratory experience.

MNTL CLEANROOM HOURS

MAIN HOURS: Mon-Fri 8AM-5PM
Engineering staff are available for questions and troubleshooting

BUDDY SYSTEM HOURS: Mon-Fri 5-10PM, Sat-Sun 8AM-5PM
Engineering staff not available
MNTL Facility staff not on site
Students must arrange to be accompanied in the lab by another student using the buddy system. The buddy system means you may not be in the cleanroom alone. You must have a “buddy” who comes in with you, checks on your wellbeing while in the cleanroom, and leaves with you. If you are in the cleanroom during buddy system hours, you need to be able to tell people who your buddy is, and where your buddy is. If you violate the buddy system, you will be at risk of losing access during buddy system hours.

MNTL has a co-op system to match up researchers who wish to use the cleanroom during Buddy System hours. To join the co-op system, please fill out the online form

MNTL CLEANROOM CLOSED: Mon-Fri 10PM-8AM, Sat-Sun 5PM-8AM
No user will be allowed to work in the cleanroom

SPECIAL OCCASIONS There will be occasions (due to holidays, illness, or vacations) that the cleanroom will be closed or Buddy System Hours will be in place of normal hours. We will announce those circumstances with as much advance warning as possible to accommodate your research.

Other Safety Measures

MNTL is the first university laboratory in the country built to conform to the H6 fire and safety codes applicable to semiconductor fabrication facilities. In addition to smoke and heat sensors, an IST hydrogen detection system monitors the complete facility, while a DOD ChemLogic continuous gas monitor detection system provides supplemental coverage in the materials growth labs. All safety systems are monitored remotely 24/7 by the University Campus Safety group. The local fire departments are updated regularly regarding any specific new hazards or changes in laboratory operating procedures.

Cleanroom Staff

Dr. Mark J. McCollum

Principal Research Engineer (Cleanroom Manager)
217.300.5181 - markjmcc@illinois.edu

Edmond Chow

Senior Research Engineer
217.244.9556 - echow@illinois.edu

Yaguang Lian

Research Engineer
217.333.8051 - yglian@illinois.edu

Lavendra Mandyam

Research Engineer
217.300.4639 - lavendra@illinois.edu