cleanroom fab person

Cleanroom Labs

About MNTL Cleanroom Labs

cleanroom-map

The cleanroom facilities within the Micro and Nanotechnology Laboratory are comprised of fifteen separate 500-square-foot laboratories. Seven of the labs are class 100. Eight are class 1000. Being designed to have less than ten microinches of floor vibration insures optimum performance from sensitive processes e.g. electron-beam lithography and SEM imaging.

Being the first university laboratory to conform to the "H6" semiconductor fire and safety codes allows us to offer a safe world-class multi-user environment. In addition to smoke and heat sensors, an IST hydrogen detection system monitors the complete facility, while a DOD ChemLogic continuous gas monitor provides coverage in the materials growth labs. Safety systems are continuously monitored by the University Campus Safety group. Local fire departments are updated on specific new hazards or changes in laboratory operating procedures.

The MNTL professional engineering staff provides maintenance, repair, training and “best practices” to enhance resident and guest researchers laboratory experience.

Lab Hours

Safety is a top priority at MNTL. In order to provide a safe working environment, students and other researchers are not allowed to work in the cleanrooms by themselves. Anyone using the MNTL cleanrooms after-hours is required to follow the laboratory's Buddy System Policy.

The Cleanrooms are closed Mon-Sun 11PM – 7AM.

Cleanroom MAIN hours: Mon-Fri 8AM-5PM
Engineering staff are available for questions and troubleshooting

Cleanroom EXTRA hours:
Mon-Fri 5PM-11PM, Saturday 8AM-Noon, Sunday 8AM-Noon

Engineering staff are not available. “Buddy” coverage provided by MNTL facility staff (Clay Childers, Alan Knell, or Rick Malloch). No need for students to sign up for a lab buddy using the online buddy system.

Cleanroom BUDDY SYSTEM hours: Saturday Noon-11PM, Sunday Noon-11PM
Engineering staff are not available. MNTL facility staff are not on site.

Students must arrange to be accompanied in the lab by another student using the online buddy “co-op” system.

There will be occasions, (due to holidays, illness, or vacations) that the Extra hours will revert to Buddy System Hours. We will announce those circumstances with as much advance warning as possible so that students/researchers may arrange for a buddy.

Other Safety Measures

MNTL is the first university laboratory in the country built to conform to the H6 fire and safety codes applicable to semiconductor fabrication facilities. In addition to smoke and heat sensors, an IST hydrogen detection system monitors the complete facility, while a DOD ChemLogic continuous gas monitor detection system provides supplemental coverage in the materials growth labs.

All safety systems are monitored remotely 24/7 by the University Campus Safety group. The local fire departments are updated regularly regarding any specific new hazards or changes in laboratory operating procedures.

Cleanroom Staff

Nancy Johnson

244.1942 - nejohnsn@illinois.edu
Principal research engineer, overseeing the operation of the MNTL cleanroom facility

Edmond Chow

244.9556 - echow@illinois.edu
Research engineer

  • E-beam lithography
  • Metrology: SEM, AFM, profilometer, ellipsometer
  • Optical and electrical characterization

Yaguang Lian

333.8051 - yglian@illinois.edu
Research engineer

  • Dry processing
  • PECVD/LPCVD
  • Oxidation/diffusion/annealing

Hal Romans

265.0423 - jromans@illinois.edu
Senior research engineer

  • Aixtron MOCVD system
  • Deposition
  • Atomate carbon nanotube CVD system
  • MTI graphene furnace
  • Oxidation, diffusion, and annealing