MNTL is one of the country's largest and most sophisticated university facilities for conducting photonics, microelectronics, biotechnology, and nanotechnology research. Our 16 class 100 and 1000 cleanrooms, 46 general purpose labs, and 2,500 square foot biosafety level-2 bionanotechnology complex contain all the tools researchers need to conduct their work.
A user facility, MNTL is a crown jewel of the University of Illinois College of Engineering. MNTL is the place where campus researchers and visiting scientists come to design, build, and test innovative nanoscale technologies with feature sizes that span the range of atoms to entire systems.
Cleanroom Labs: Crystal Growth Capabilities
- Molecular Beam Epitaxy (MBE)
- Chemical Beam Epitaxy (CBE)
- Metal-Organic Chemical Vapor Deposition (MOCVD)
Clean Room Labs: Semiconductor fabrication tools
- E-beam & optical lithography
- Plasma-enhanced deposition of oxides and nitrides
- Sputter deposition
- Thermal and electron-beam metallization
- Reactive ion etching
Device Characterization Lab
Offers a variety of ultra-high-speed optical and electrical measurement and test equipment.
Allows interdisciplinary biological and micro and nanotechnology research experiments to be carried out simultaneously—all under the same roof.