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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Our Facilities

The Micro and Nanotechnology Laboratory (MNTL) is a state-of-the-art multidisciplinary research facility in the College of Engineering at the University of Illinois at Urbana-Champaign. In January 2007, a $20 million expansion of the building was completed, providing a net total of 117,000 square feet of office and laboratory space, including 8,000 square feet of Class 100 and Class 1000 clean rooms and a new 2500 square-foot laboratory complex specifically designed for bionanotechnology.

The MNTL includes special facilities for (1) growth of artificially structured semiconductor materials, including Molecular Beam Epitaxy (MBE), Chemical Beam Epitaxy (CBE), and Metal-Organic Chemical Vapor Deposition (MOCVD), (2) fabrication of submicron silicon and compound semiconductor electronic and optoelectronic devices, such as MOSFETs, MESFETs, HBTs, MEMS, semiconductor lasers, waveguides, and modulators, utilizing electron beam and optical lithography, plasma-enhanced deposition of oxides and nitrides, sputter deposition, thermal and electron-beam metallization, and reactive ion etching, and (3) ultrahigh-speed optical and electrical measurements and characterization of semiconductor materials. Faculty and students also have access to extensive computing resources.

Laboratory equipment funded by a specific research group or groups may be accommodated in MNTL common-use laboratories as long as prior approval is given, and those responsible for purchasing the equipment agree to allow it to be used by other, properly trained users. Such tools may have restrictions placed on their use to insure acceptable performance with regard to the purposes for which the tools were purchased, but all processes and procedures approved and used by the purchaser(s) must also be allowed to be performed by others.

Approved equipment, supplies, and other items intended for use in MNTL common-use laboratories will generally be paid for through MNTL accounts if it can be shown that they are used by multiple research groups. Items whose use is restricted, or which only have utility for a single research group, must be paid for by that group.