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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Wet Bench with Digital Hotplates

Description:

The wet bench with digital hotplates located in the Optical Lithography Laboratory is a solvent hood for use in the preparation, pre-/post-exposure bake, development, and strip steps of optical lithography processes. The hood features halogenated and non-halogenated solvent reclamation containers.