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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Veeco NT1000 Optical Profiler

Veeco NT1000 Optical Profiler


Wyko NT1000 optical 3D profiler manual metrology system uses noncontact interferometry for highly accurate, fast three-dimensional surface height measurements from 10 nm-1mm. Gauge-capable NT1000 includes a manual X/Y stage, coarse/fine focus, and tip/tilt adjustment with optional multi-objective turret and field-of-view lenses.

For more information contact Edmond Chow (

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Operating procedure (.pdf file)

Last Updated: Nov 2013

  Screenshot of 3D image of MEMS device
  Screenshot of 2D step height analysis