facilities
Highlights
Veeco NT1000 Optical Profiler
Description:
Wyko NT1000 optical 3D profiler manual metrology system uses noncontact interferometry for highly accurate, fast three-dimensional surface height measurements from 10 nm-1mm. Gauge-capable NT1000 includes a manual X/Y stage, coarse/fine focus, and tip/tilt adjustment with optional multi-objective turret and field-of-view lenses.
For more information contact Edmond Chow (echow@uiuc.edu)
Operating procedure (.pdf file)
Last Updated: Aug 2012
| Screenshot of 3D image of MEMS device | |
| Screenshot of 2D step height analysis |