Illinois Mark

Micro and Nanotechnology Laboratory | U of I

Main Navigation


CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a – 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

Facilities

Tencor Alpha-Step 200 Profilometers

Tencor Alpha-Step 200 Profilometers

Description:

The AlphaStep 200 computerized surface profiler auto-levels and auto-scales step heights up to 160 kA in the kA mode or up to 160 µm in the µm mode, with scan lengths up to 1 cm. The vertical resolution is 5 Angstroms.