Illinois Mark

Micro and Nanotechnology Laboratory | U of I

Main Navigation


CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

STS Advanced Silicon Etcher

STS Advanced Silicon Etcher

Description:

The STS Mesc Multiplex Advanced Silicon Etcher (ASE®) is an anisotropic deep silicon etching system. The tool is set-up to etch 4” silicon wafers, or piece-parts mounted to 4” silicon wafers or alumina sample carriers. The tool can also handle 6” wafers, but will only properly etch the center 4”.

STS ASE Instructions (pdf)

 

Manufacturer:

Surface Technology Systems plc
Imperial Park
Newport, NP10 8UJ
UK
Tel: +44 1633 652400
Fax: +44 1633 652405

ST Systems USA Inc
177A Portsmouth Avenue
Stratham, NH 03885

Tel: (603) 775 0840
Fax: (603) 775 0441