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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

SPI Au Sputter Coater for SEM Sample Prep

SPI Au Sputter Coater for SEM Sample Prep

Description:

The SPI Au Sputter Coater is used for the coating of samples with a thin (~40Å) layer of gold in preparation for viewing in an SEM. The sputter tool can accept samples from piece-parts to 2" wafers.