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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

SCS Parylene Deposition System

SCS Parylene Deposition System

Description:

The SCS Parylene deposition system allows for the coating of samples with Parylene, a plastic thin film that can be deposited using low pressure chemical vapor deposition (LPCVD) process at room temperature and under 40 mTorr. The Parylene deposition system is capable of depositing thin film on multiple wafers. The thickness can range from 1-10 µm and is controlled by a Parylene thickness end-point monitor.