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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


SCS Parylene Deposition System

SCS Parylene Deposition System


The SCS Parylene deposition system allows for the coating of samples with Parylene, a plastic thin film that can be deposited using low pressure chemical vapor deposition (LPCVD) process at room temperature and under 40 mTorr. The Parylene deposition system is capable of depositing thin film on multiple wafers. The thickness can range from 1-10 µm and is controlled by a Parylene thickness end-point monitor.