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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Leo (Leica/Cambridge) S360 Scanning Electron Microscope

Description:

The Cambridge S-360 scanning electron microscope features a LaB6 source and an acceleration voltage of 20kV. It features an image capture system for digital storage of images and can handle samples from piece-parts to 2" wafers. The stage features tilt capability from 0º to 90º.