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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Quintel Q7000 IR Backside Mask Aligners

Description:

The Quintel UL 7000 Series Mask Aligner is a research and development/production mask aligner that features multiple contact & proximity exposure modes, I-line ultraviolet (UV) exposure, and can handle samples from pieces to 100 mm diameter wafers. Alignment is performed manually using a CCTV split-field microscope and allows for infrared (IR), through-wafer, backside alignment. The tool features simple topside mask loading and manual tray sample loading.

For more information contact Glennys Mensing

Manufacturer:

QUINTEL Corporation
2431 Zanker Road
San Jose, CA 95131-1116
Tel: (408) 435-1995
Fax: (408) 435-8120