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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

PlasmaTherm SLR-770 Inductively Coupled Plasma Reactive Ion Etcher

PlasmaTherm SLR-770 RIE

Description:

A 6 inch diameter parallel plate reactive ion etch system, the Plasma Therm shuttlelock SSL-770 is configured with a load lock capable of handling 4 inch wafers. The microprocessor control allows the user to select from eight etch gases including chlorine based gases for III - V and compound semiconductor etching.

Metal and photoresist are not allowed in the system.

Characteristics:

Chlorine based gases: Cl2, BCl3, SiCl4, CHF3, HBr
Load locked sample introduction
Up to 4 inch wafer capability
Turbomolecular pumping
Microprocessor control

Features:

10 - 1000 mT processing pressure
Incident power or voltage control
Substrate temperature uniformity
Variable gas chemistry

Links:

Standard Procedure