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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

PlasmaLab Master / Slave Dual-Chamber Reactive Ion Etcher

PlasmaLab Dual-Chamber Reactive Ion Etcher

Description:

The “master” chamber is a turbo pumped general purpose RIE utilizing the following gases:
Ar, BCl3, Cl2, O2, SiCl4, SF6, H2, CH4, N2

The “slave” chamber is also general purpose and uses:
R14 (CF4), CH4, Ar, O2, SF6, H2, N2

Master Chamber Instructions (pdf)

Slave Chamber Instructions (pdf)