Micro and Nanotechnology Laboratory | U of I

Micro and Nanotechnology Laboratory

College of Engineering - University of Illinois at Urbana-Champaign

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

Office hours 8:30a - 5:00p

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

About our Facilities

Director's Welcome

BioNanotechnology Lab

Device Characterization Lab

MNTL Lab Equipment Lists

Our Latest Newsletter (Spring 2012- Vol V no. I)

Newsletter Archive

CNST nPEAP Seminars

Using Our Facilities

Access Guidelines

Building Access Procedure

Equipment Scheduling System

Rates & Applicable Charges

Facilities Use Agreement

Policies & Procedures Manual

Cleanroom Rules of Conduct

Cleanroom Cleaning Schedule

Seminar Room/Atrium Reservation Request

Work Request Form

Medical Emergency Procedures

PlasmaLab Freon/O2 Reactive Ion Etcher (RIE) System

PlasmaLab Freon/O2 RIE

Description:

The PlasmaLab RIE has O2, R14 (CF4), and R23 (CHF3) gases available for use.

Freon RIE Instructions (pdf)