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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

STS Mixed-Frequency Nitride PECVD System

STS Mixed-Frequency Nitride PECVD System Data Process (pdf)

Instruction Set (pdf)

Description:

The STS Mesc Multiplex PECVD is a dual frequency (13.56 MHz and 380 kHz) silicon nitride deposition system. Silicon nitride can be grown in either high-, low- or mixed-frequency modes in order to tailor the film stress to a particular application. . The tool is set-up to handle 4” or 6” silicon wafers, or piece-parts mounted to 4” or 6” silicon wafers or alumina sample carriers.

Manufacturer:

Surface Technology Systems plc
Imperial Park
Newport, NP10 8UJ
UK
Tel: +44 1633 652400
Fax: +44 1633 652405

ST Systems USA Inc
77A Portsmouth Avenue
Stratham, NH 03885
Tel: (603) 775 0840
Fax: (603) 775 0441