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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Olympus Inspection Microscope with Video Camera and Monitor

Description:

The Olympus inspection microscope features full spectrum illumination and magnification up to ???x. The microscope is suitable for post development inspection of electron-beam lithography and features a graticule for the measurement of features down to ~1 µm. The microscope is fitted with a color camera and monitor.