facilities
Highlights
M-probe Thin-film measurement system
Description:
The M-probe Thin-film measurment system uses a fiber optics probe for reflectance measurement covering UV-Vis-NIR wavelength (250nm-1700nm). With 500+ materials database (oxides, nitrides, photoresist) of refractive index and absorption, the system can measure film thickness from 100nm-100um.
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Cr Reflectance | |
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Au Reflectance |
Operating procedure (.pdf file)