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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

M-probe Thin-film measurement system

Description:

The M-probe Thin-film measurment system uses a fiber optics probe for reflectance measurement covering UV-Vis-NIR wavelength (250nm-1700nm). With 500+ materials database (oxides, nitrides, photoresist) of refractive index and absorption, the system can measure film thickness from 100nm-100um.

  Cr Reflectance
  Au Reflectance

Request Training

Operating procedure (.pdf file)

For more information contact Edmond Chow (echow@uiuc.edu)