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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Olympus, Nikon Inspection Microscopes

Description:

The Nikon and Olympus inspection microscopes feature UV-filtered illumination and magnification up to ???x. The microscopes are suitable for post development inspection of optical lithography and feature a graticule for the measurement of features down to ~1 µm.