Facilities
Highlights
Lindberg/Tempress Model 8500 Dual-Stack Diffusion/Oxidation Furnaces
Description:
This system has 8 tubes which are currently reserved for the following: wet oxidation, dry oxidation, GaN anneal, SiC oxidation, and polymer bake. There are spare tubes available which could be used for Boron or Phosphorous diffusion, or other as yet undeveloped processes.