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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

Facilities

Lindberg/Tempress Model 8500 Dual-Stack Diffusion/Oxidation Furnaces

Lindberg/Tempress Model 8500 Dual-Stack Diffusion/Oxidation Furnaces

Description:

This system has 8 tubes which are currently reserved for the following:

  • wet / dry oxidation
  • GaN anneal
  • SiC oxidation
  • polymer bake
  • Boron Diffusion
  • Phosphorous diffusion
  • A "No Restrictions" tube, which has forming gas (H2 mixture) supplied

All tubes operate at atmospheric pressure and are capable of temperatures to 1150C. They are all supplied with N2 and O2.

See temperatuer calibration information here.