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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Hitachi S-4800 Field Emission Scanning Electron Microscope


The Hitachi S-4800 field emission scanning electron microscope features a maximum resolution of 1.0 nm and a variable acceleration voltage of .5 - 30 kV. Both secondary electron and backscattering electron detectors are available for imaging.It features an image capture system for digital storage of images and image files can be transfered through network or USB drive. It can handle samples from piece-parts to 6" wafers. The stage can rotate 360° and tilt -5° to 70°. It provides STEM imaging capability at 30kV, which may be useful for STEM imaging in biological samples that cannot withstand 200kV accelerating voltage in standard TEM.

For more information contact Edmond Chow (

Email to all S4800 users (

Operating procedure (.pdf file)

Request Training

Register for Metrology process module lecture

Report S4800 Problem

Training video (~20min)

Last Updated: Jan 2014

STEM image of carbon nanotube SEM image of carbon nanotube