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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

Facilities

Hitachi S-4500 Field Emission Scanning Electron Microscope

Description:

The Hitachi 4500 field emmision scanning electron microscope features a maximum resolution of <5nm; and a variable acceleration voltage of .5 - 30 kV. It features an image capture system for digital storage of images and can handle samples from piece-parts to 6" wafers. The stage features tilt capability from 0º to 15º.

For more information contact Edmond Chow

Operating procedure (.pdf file)

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Last Updated: Nov 2013

  SEM image of 30nm Au disc
  SEM image of sputtering Au particles