Facilities
Highlights
Hitachi S-4500 Field Emission Scanning Electron Microscope
Description:
The Hitachi 4500 field emmision scanning electron microscope features a maximum resolution of <5nm; and a variable acceleration voltage of .5 - 30 kV. It features an image capture system for digital storage of images and can handle samples from piece-parts to 6" wafers. The stage features tilt capability from 0º to 15º.
For more information contact Edmond Chow
Operating procedure (.pdf file)
Last Updated: Oct 2008
| SEM image of 30nm Au disc | |
| SEM image of sputtering Au particles |