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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


FSM Film Stress Measurement System


The FSM 500TC is a film stress measurement system that can test the stress of different films on different substrates, such as SiO2/Si, Si3N4/GaAs, etc.  The system can also test coefficient of thermal expansion (CTE) of the films. It has an N2 ambient and a programmable temperature control system, allowing the evaluation of the thermal properties and stability of the films at temperature ranging from room up to 500⁰C. The FSM 500TC accommodates wafer from 2 to 8 (50 to 200mm).

Click here for FSM Manual