Cooke E-Beam/Thermal Evaporator
Cooke The tool operates at a base pressure of 8 x 10 7 T
and has 2 independent resistive power supplies and an electron
beam (e beam) gun with 4 source crucibles. Currently approved
deposition materials are Ag, Au, Cr, Ge, Ni, Mo, Pd, Pt, and Ti.
Two 3 inch (75mm) round targets can be positioned above any of
the three sources. Each source is controlled to provide control
of deposition thickness and rate.