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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Cooke E-Beam/Thermal Evaporator

Cooke E-Beam/Thermal Evaporator


The Cooke The tool operates at a base pressure of 8 x 10 ­ 7 T and has 2 independent resistive power supplies and an electron beam (e ­ beam) gun with 4 source crucibles. Currently approved deposition materials are Ag, Au, Cr, Ge, Ni, Mo, Pd, Pt, and Ti. Two 3 inch (75mm) round targets can be positioned above any of the three sources. Each source is controlled to provide control of deposition thickness and rate.