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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Bake Ovens

Description:

The bake ovens located in the Electron-beam Chemistry Laboratory are targeted for use in the bake step of electron-beam lithography processes up to a temperature of 200 ºC. The ovens are capable of providing an N2 ambient.