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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


CHA SEC-600 E-Beam/Thermal Evaporator

CHA SEC-600 E-Beam/Thermal Evaporator Description:

The CHA has 2 independent resistive power supplies and an electron beam (e – beam) gun with 4 automatically selected source crucibles. Currently approved deposition materials are Ag, Al, Au, Cr, Ge, Ni, Mo, Pd, Pt, Ti, and W. Two 4 inch (100mm) round targets can be positioned (automatically) above any of the three sources. Alternatively, a 1 inch square sample holder with 1000W substrate heater can be installed above a resistive source. A computerized controller provides precise control of deposition thickness and rate, and allows one to save and reload recipes for single and multiple layer processes.

CHA Instructions

CHA Quick Reference