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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

CEE Digital Hotplates

CEE Digital Hotplates

Description:

The CEE digital hotplates in the Electron-beam Chemistry Laboratory are for use in the pre-/post-exposure bake steps of electron beam lithography processes. One is maintained at 110 ºC and the other at 200ºC. They are capable of accommodating samples and mask plates up to 5” square.