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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Digital Instruments Dimension 3000 Atomic Force Microscope

Digital Instruments Dimension 3000 Atomic Force Microscope

Description:

The Digital Instruments Dimension 3000 utilizes automated atomic force microscopy (AFM) techniques to allow users to profile resists, or inspect surface topography and roughness.

For more information contact Edmond Chow (echow@uiuc.edu)

Operation procedure (.pdf file)

Introduction to AFM (~2hr) by Dr. Nicholas Geisse

Request Training

Last Updated: Nov 2013

  AFM image of 40nm Au dot
  AFM image of 3um pitch grating