facilities
Highlights
YES HMDS Vapor Prime Vacuum Oven
System Description:
The YES HMDS Vapor Prime Vacuum Oven is used for the vapor-priming of substrates with hexamethyldisilazane (HMDS), and adhesion promoter, prior to photo/e-beam resist application. The oven can be used to prime samples from piece-parts to 8" wafers.
For more information, contact Super User John Hughes.