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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


YES HMDS Vapor Prime Vacuum Oven

System Description:

The YES HMDS Vapor Prime Vacuum Oven is used for the vapor-priming of substrates with hexamethyldisilazane (HMDS), and adhesion promoter, prior to photo/e-beam resist application. The oven can be used to prime samples from piece-parts to 8" wafers.

For more information, contact Super User John Hughes.