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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Nanometrics Nanospec AFT 4000

Tencor Alpha-Step 200 Profilometers


The Model 4000 NanoSpec  AFT Automated Film Thickness Measurement System is an instrument designed to measure the thickness of films deposited on various substrates.  In the measurement system of the Model 4000, the spectrophotometer head is mounted on a customized microscope that uses a regulated tungsten halogen lamp to provide vertical reflected light illumination.

The Model 4000 offers these important features and options:

  • Small spot size
  • Fast measurements
  • Broad thickness ranges
  • Multipurpose thin and thick film capability
  • Continuous scanning from 200-900 nanometers
  • Absolute and relative reflectance measurements
  • Real-time sample and model interferogram plotting

The measurement range of the Model 4000 extends from 150 to 750,000 A (75 microns).

For more information contact Mike Hansen.

Nanospec Procedure