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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Metricon Model 2010/M Prism Coupler


The Metricon Model 2010/M Prism Coupler utilizes advanced optical waveguiding techniques to rapidly and accurately measure both the thickness and the refractive index/birefringence of dielectric and polymer films. Our system is equipped with four different lasers at wavelength:449nm,633nm,963nm and 1540nm. It can therefore allow us to measure refractive index at four different wavelengths and provide Cauchy dispersion fitting (index vs wavelength) Two prisms with are included in the system to cover index from 1.45-2.4

Prism#200-P4 Si dioxide(n=1.46) >720nm, Si oxynitride(n=1.8) >400nm, Si nitride(n=2.0) >320nm

Prism#200-P2 Si oxynitride(n=1.8) >600nm, Si nitride(n=2.0) >400nm, Li niobate(n=2.2) >350nm, Si carbide(n=2.40) >300nm

  Intensity versus angle for 461.4nm Si nitride film with 3 guiding modes
  Cauchy dispersion fit for Si nitride film with 449nm, 633nm, and 963nm wavelenght

For more information contact Edmond Chow (