Illinois Mark

Micro and Nanotechnology Laboratory | U of I

Main Navigation


CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

MTI Graphene Furnace

System Description:

 

The MTI graphene furnace allows for growth of graphene on various substrates.

Current gases available for growth are methane, hydrogen and argon. There is an unused gas channel available for possible expansion of capabilities.

No polymers are allowed inside the chamber.

 

Operating Instructions

 

MTI Website