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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


MTI Graphene Furnace

System Description:


The MTI graphene furnace allows for growth of graphene on various substrates.

Current gases available for growth are methane, hydrogen and argon. There is an unused gas channel available for possible expansion of capabilities.

No polymers are allowed inside the chamber.


Operating Instructions


MTI Website