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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Gaertner LSE Ellipsometer

Description:

The Gaertner LSE Ellipsometer uses advanced StokesMeter™ technology with no moving parts and no modulators to quickly and accurately determine the complete polarization state of the laser measuring beam at a 70° incidence angle. Our system is equipped with three lasers of wavelength 405nm,633nm and 830nm. It can easily measure down to 1nm SiO2 or SiN film on Si. The sample stage (accomodate up 8 inch wafer) can be easily moved by hand to measure any point on the sample surface. The sample table includes a manual tilt and table height adjustment which is set using an alignment screen on the computer.

  Screenshot of GEMP (Gaertner Ellipsometer Program)

Request Training

Operating procedure (.pdf file)

Calculating Cauchy Coefficient (.xlsx file)

For more information contact Edmond Chow (echow@uiuc.edu)