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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

EVG 620 Mask Aligners

Description:

The EVG 620 is an i-line (365 nm) mask aligner capable of 0.5 micron feature resolution and can attain one-micron frontside and two-micron backside alignment accuracy (based on the operator’s ability).  The aligner is currently configured with a 5-inch mask plate holder (for aligning 4-inch wafers) and can accommodate masks of different thicknesses.  A 7-inch mask plate holder (for 6-inch wafers) is also available, and a 4-inch mask plate holder (for 3-inch wafers) is on order. Smaller wafers and pieces can be aligned with the appropriate chuck.

Please contact the superuser, Glennys Mensing, if you are interested in getting training on this tool.