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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Denton Ebeam Optical Coater

Description:

The Denton Optical Coater utilizes a 4 pocket ebeam source to evaporate dielectric / optical materials only. Currently the only allowed materials are TiO2, HfO2, SiO2 and Ta2O5. O2 can be added with or without ionization to improve film quality.