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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

Lithography

Scanning Electron Microscopy

Etching

Evaporation / Sputtering Deposition

Click here for a list of evaporator supplies

Chemical Vapor Deposition

E-Beam Chemistry

General Chemistry

Diffusion/Oxidation/Anneal

 

Characterization and Analysis

Other

Contact Information:

Additional information can be obtained from the tool's super user (list here). For further tool information or to inquire about using the UIUC Micro and Nanotechnology Laboratory, please contact Nancy Johnson using the telephone number or e-mail address below:

Micro and Nanotechnology Laboratory
University of Illinois at Urbana-Champaign
208 North Wright Street
Urbana, IL 61801
Phone: (217) 244-1942
E-Mail: Nejohnsn@illinois.edu