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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Atomate Carbon Nanotube CVD Growth System

System Description:

The Atomate carbon nanotube CVD growth system allows for growth of both multi and single walled carbon nanotubes on substrates up to 1 cm × 1 cm in size. Current gases available for growth are methane, ethylene, hydrogen, and argon. Recipes and processes are fully customizable using Atomate’s recipe editor. The system is computerized and fully automated. No polymers are allowed inside the chamber.