Atomate Carbon Nanotube CVD Growth System
Atomate carbon nanotube CVD growth system allows for growth of both multi and
single walled carbon nanotubes on substrates up to 1 cm × 1 cm in size. Current
gases available for growth are methane, ethylene, hydrogen, and argon. Recipes
and processes are fully customizable using Atomate’s recipe editor. The system
is computerized and fully automated. No polymers are allowed inside the chamber.