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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


KLA - Tencor Alpha-Step P10 Profilometer

Tencor Alpha-Step 200 Profilometers


The KLA-Tencor Alpha-Step P-10 profiler is a computerized, highly sensitive surface profiler that measures step height, roughness and waviness. It features a vertical range from under 50Ȧ to130 µm at <0.1Ȧ, and 1Ȧ vertical data resolution. The maximum sample diameter is 205 mm (8 in.).  It also has motorized Level and Rotation which helps reduce the need for operator intervention by enabling automatic mechanical leveling of the sample, and programmable sample rotation using a motorized rotary stage, enabling programmed θ-position repeatability of 4µm (0.16 mil) at 4 in. from the center. This system was recently upgraded to a P-11 system with new parts and software.

For more information contact Mike Hansen.

P10 Procedure