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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


KLA - Tencor Alpha-Step IQ Profilometer

Tencor Alpha-Step 200 Profilometers


The Alpha Step IQ Profilometer has a stylus with a 5um tip on a 60° include cone with a bevel height of 880ums. The profilometer can measure vertical features ranging from under 100A to approximately 2 mm with a vertical resolution of 0.012A or 0.24A respectively. However, the minimum sampling rate is 0.01um. The profilometer can accommodate samples up to 150mm (6 in.) wide and 15mm (.59 in.) thick. The profilometer is set up on a vibration isolation table to reduce noise, which can affect the minimum height and resolution. The maximum scan length is 2mm from right to left, 10mm from left to right, and scan speeds in the range of 2-200um/sec. Analysis of the scan can be performed using the Alpha-Step IQ software measuring profiles, roughness/waviness, and the step height.

For more information contact Edmond Chow.

Profilometer Procedure