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Micro and Nanotechnology Laboratory | U of I

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CONTACT US

 

Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801

 

Office hours 8:30a - 5:00p

 

Phone: 217-333-3097
Fax: 217-244-6375
email: mntl@illinois.edu

facilities

AG Rapid Thermal Processor

Description:

The AG 610 rapid thermal processor for small piece to 6” wafer, which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. It has aluminum chamber with water cooling and gold plating for better uniformity, extended range   pyrometer (ERP) for high temperature sensor and control, isolated quartz tube of clean environment for wafer,  bottom and top heating with radiation heating lamp module,  and precise temperature/time control, temperature measurement. It contacts with N2 and Ar. Temperature range is from 600°C to 1100°C. Ramp rate is from 10°C/s to 50°C/s.

Procedures