facilities
Highlights
Micro and Nanotechnology Laboratory Equipment
Contact Information:
Additional information can be obtained from the tool's super user (list here). For further tool information or to inquire about using the UIUC Micro and Nanotechnology Laboratory, please contact John Hughes using the telephone number or e-mail address below:
Micro and Nanotechnology Laboratory
University of Illinois at Urbana-Champaign
208 North Wright Street
Urbana, IL 61801
Phone: (217) 333-4674
Fax: (217) 244-6375
E-Mail: hughes@illinois.edu

