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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Cleanroom Labs

The cleanroom facilities within the Micro and Nanotechnology Laboratory are comprised of sixteen separate 500-square-foot laboratories, for a total of 8000 square feet of usable cleanroom lab space. Eight of the labs are class 100, while the other eight are class 1000. (See Cleanroom Map.) The structure was designed to have less than ten microinches of floor vibration throughout the cleanroom lab complex. This insures optimum performance from ultra-sensitive equipment such as electron-beam lithography systems and scanning electron microscopes.

This is the first university laboratory in the country built to conform to the "H6" fire and safety codes applicable to semiconductor fabrication facilities. In addition to smoke and heat sensors, an IST hydrogen detection system monitors the complete facility, while a DOD ChemLogic continuous gas monitor detection system provides supplemental coverage in the materials growth labs. All safety systems are monitored remotely 24 hours a day by the University Campus Safety group. The local fire departments are updated regularly regarding any specific new hazards or changes in laboratory operating procedures. Anyone using the MNTL cleanrooms after-hours is required to follow the laboratory's Buddy System Policy.

Cleanroom User Information